The article on Forbes discusses the advancements made by Applied Materials in developing new materials and technologies for AI and chipmaking in the “angstrom era.” As the industry progresses to process nodes at 2nm and below, Applied Materials is addressing the challenges posed by such advancements with innovative solutions.
Key points from the article include:
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Introduction of New Technologies: Applied Materials has introduced several new technologies to improve chip patterning, including the Centura® Sculpta® patterning system, the Sym3® Y Magnum™ etch system, and the Producer® XP Pioneer® CVD patterning film. These technologies help in reducing patterning steps, improving chip yields, and addressing issues like line edge roughness and edge placement errors.
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Sculpta Patterning System: This system allows chipmakers to reduce EUV double patterning steps by elongating patterned features, thus bringing the tips closer together than achievable with single EUV exposure. It’s being adopted by major chipmakers like Intel and Samsung for its ability to improve throughput, wafer yield, and reduce costs.
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Sym3 Y Magnum Etch System: This system combines deposition and etch technology to smoothen EUV line patterns, increasing yields and reducing line resistance, which enhances chip performance and power consumption.
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Producer XP Pioneer CVD Film: This film is designed to transfer patterns to the wafer with high fidelity and is resilient to advanced etch chemistries, enabling better sidewall feature uniformity and thinner film stacks.
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Acquisition of Aselta Nanographics: Applied Materials has integrated Aselta’s contour technology into its eBeam metrology systems to enhance design-based metrology, which improves the precision of on-chip features and placement, crucial for the angstrom era of chipmaking.
Applied Materials is making significant strides in patterning technology to support the continued miniaturization and increased performance of semiconductors, which are essential for the future of AI and other advanced computing technologies.
For more detailed information, you can read the full article on Forbes: